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Epitaxial YBCO HTS Thin Film Up to 3" ( 75 mm )
MTI Corp joins with several research institutes around the world, to finally make high Tc superconducting
epitaxial thin film commercially available at an affordable price. MTI supplies high quality double side epitaxial
thin film up to 30?3 diameter on LaAlO3, LSAT, Al2O3 and SrTiO3 single crystal substrate by a unique technology.
This will make YBCO thin film available at very low cost. Researchers don't need to grow thin film any more, but concentrate their talent on HTSC film related devices, such as microwave filter for wireless and HTSC Squid.
Main Specifications of HTS Film
Epitaxial thin Film Composition
YBCO
Film dimension
both for one side or double side film
YBCO / LaAlO3 10x10 mm ~ 3" dia.
YBCO / LSAT 10x10 mm ~ 2" dia.
YBCO / Al2O3 10x10 mm ~3" dia
YBCO / STO 10x10 mm ~ 1" dia.
Epitaxial FWHM
o
Critical Transition Temperature Tc
> 90 K
Transition Temp. range ?60?62Tc
Critical Current Jc
2~3 MA/cm2 @ 77K 0T
Surface Resistivity Rs
Thin film thickness
200 C 500 nm upon request ,
Uniformity for 20?3 wafer
Thickness 400 nm +/- 10 %
Tc 90K +/- 1 o
Jc 3 +/-0.5 MA/cm2 @ 80% wafer center.
Package
Sealed in Vacuum in a plastic box and bag.Double side 30?3 YBCO film on LAO0?3?04s Jc Uniformity measured FZK XRD pattern of Epi YSCO Film on LAO
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