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Single crystal YSZ Substrate
Size: 5x5 x 0.5mm +/-0.05 mm
Orientation: (100) +/-0.5o
Polish: polished by CMP technology . Two sides polished (2SP)
Surface roughness:
Pacjing: The substrate is packed in 100 grade clean plastic bag under 1000 class clean room
Typical Physical Properties
Chemical Formula: (Zr,Y)O2 with Zr : Y = 91:9
Crystal Sructure: Cubic, Face Centered, CaF2 type
Unit Cell : a = 5.125 ?0?6?0?6?0?6?06¥76767703
Density : 5.8 g / cc
Purity: 99.99%
Melting Point: 2500 oC
Thermal Expansion Coeff 10.3 ppm / oC
Dielectric Constant: 27
Crystal Growth Technique: Flux Technique
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