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Specs of MgO substrate
Size: 5 mm x 5 mm x 0.5mm +/-0.05 mm
Orientation: (100) +/-0.5 o
Polish: One side EPI polished by CMP technology with minimum sub-surface damage.
Surafce Roughness: Ra
Packing: The substrate is packed with 100 grade clean plastic bag under 1000 class clean room.
Precautions: MgO is sensitive to moisture, and must be stored in vacuum box.
Typical Properties
Crystal Structure
Cubic, a=4.216 A
Growth Method
Special Arc Melting
Typical Purity:
>99.95%
Typical Impurity (ppm)
Ca 40, Al15, Si10, Fe50, Cr 10, B, C 10
Melting Point
2852 oC
Crystal Purity
> 99.95%
Crystal cleavage plane
Density
3.58 g/cm3
Dielectric constant
9.8
Thermal expansion
12.8 x10-6/ oC
Optical Transmission
> 90% @ 200 ~ 400 nm > 98 % 500 ~ 1000 nm
Crystal Prefection
No visible inclusions and micro cracking, X-Ray rocking curve available
Standard MgO Crystal Substrates Specification
Orientation
+/- 0.2o
and +/- 0.5o
Polished surface
EPI polished on one side or two sides to Ra
Special size and orientation are available upon request
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